Apparatus to conduct spin-on film processing

ABSTRACT

An apparatus and process operate to impose acoustic radiation pressure upon a spin-on mass to alter topography of the spin-on mass. Other apparatus and processes are disclosed.

CLAIM OF PRIORITY

This application is a continuation of and claims the benefit of priorityunder 35 U.8.C.§120 to U.S. patent application Ser. No. 12/098,124,filed on 4 Apr. 2008, which is hereby incorporated by reference hereinin its entirety.

BACKGROUND

During semiconductor device fabrication processes, spin-on films areformed upon semiconductive wafers. Film thickness and uniformity areprocess variables.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure addresses spin-on film uniformity and thicknessissues, and will be understood by reading and studying the followingspecification, of which the figures are a part.

FIG. 1 shows a top plan view of a plurality of acoustic radiationpressure broadcast sources disposed in an array according to anembodiment;

FIG. 2 shows a cross-section elevation of a semiconductive wafer duringspin-on processing that uses acoustic radiation pressure on the spin-onmass according to an embodiment;

FIG. 3 is a detail of a portion of an acoustic radiation pressure sourceduring spin-on processing according to an embodiment;

FIG. 4 shows a top plan view of a plurality of acoustic radiationpressure broadcast sources disposed in an array according to anembodiment;

FIG. 5 is a cross-section elevation of a spin-on mass applier that usesacoustic radiation pressure during dispensing according to anembodiment; and

FIG. 6 is a process flow diagram according to an embodiment.

DETAILED DESCRIPTION

The embodiments of a device, an apparatus, or an article describedherein can be manufactured, used, or shipped in a number of positionsand orientations. Some will be shown below, and numerous others will beunderstood by those of ordinary skill in the art upon reading thefollowing disclosure.

FIG. 1 shows a top plan view of a plurality of acoustic radiationpressure (ARP) broadcast sources disposed in an array 100 according toan embodiment. The array 100 includes amounting substrate 110 and aplurality of ARP broadcast sources, one of which is designated withnumeral 112. The array 100 may have a substantially circular form factorwith a diameter that is large enough to approximate the size of asemiconductive wafer during wafer processing.

FIG. 2 a shows a cross-section elevation 200 of a semiconductive wafer214 during spin-on processing that uses acoustic radiation pressure on aspin-on mass 216 according to an embodiment. For illustrative purposes,a device and metallization layer 215 is depicted below a spin-on mass216. The spin-on mass 216 is depicted with an exaggerated irregularupper surface for illustrative purposes. The spin-on mass 216 tends toform depressions above depressions in the device and metallization layer215 and it tends to from prominences above prominences in the device andmetallization layer 215. A measurement between the bottom of adepression and the top of an adjacent prominence is referred to as astep height.

A plurality of ARP broadcast sources are disposed in a first array 201.The first array 201 includes a mounting substrate 210 and a plurality ofARP broadcast sources, one of which is designated with reference numeral212.

The semiconductive wafer 214 is disposed upon a spinner 218. A secondarray 202 of ARP broadcast sources are disposed on a mounting substrate211, and one of the sources is designated with reference numeral 213.

As depicted, the spin-on mass 216 on the semiconductive wafer 214exhibits a spin-on film liquid topography. The liquid topography isshown with an arbitrary shape and size for illustrative purposes. Thearbitrary shape and size is exhibited in the “head space” between thetop of the spin-on mass 216 and the ARP broadcast sources 212. Becauseof the small geometries of the thickness of the spin-on mass, theentirety of the spin-on mass 216 may be affected by boundary layereffects.

In an embodiment, the spin-on mass 216 is a glass material. In anembodiment, the spin-on mass 216 is a masking material. In anembodiment, the spin-on mass 216 is an interlayer dielectric material.

FIG. 2 a also depicts acoustic radiation pressure as emanating waves 220and 222 being sourced from the respective arrays 201 and 202. In aprocess embodiment, the spin-on mass 216 is dispensed onto thesemiconductive wafer 214 while the spinner 218 is being rotated. Boththe first array 201 and the second array 202 of acoustic radiationpressure broadcast sources 212, 213 are active to alter the liquidtopography of the spin-on mass 216. In an embodiment, only one of thefirst array 201 or the second array 202 of ARP broadcast sources 212,213 is used to assist in altering the liquid topography of the spin-onmass 216.

In an embodiment, the first array 201 is used to alter the liquidtopography of the spin-on mass 216, in addition to use of the spinner218. In an embodiment, the first array 201 provides ultrasonic acousticradiation, defined as a frequency up to about 900 kHz. In an embodiment,the first array 201 emanates megasonic acoustic radiation, defined as afrequency above about 900 kHz, to about 2 MHz. Modulating of the ARP mayinclude changing either of the frequency or of the amplitude thereof.Modulating of the ARP may include changing the uniformity of the ARPfrom a uniform pulse to an asymmetrical pulse.

In an embodiment, the first array 201 is spaced apart and above thespin-on mass 216 by a spacing distance 224 that is related to thediameter of a given ARP broadcast source 212. In an embodiment, a13-inch wafer 214 is processed with about 52 ARP broadcast sources thatmay be arranged similarly to the array 100 depicted in FIG. 1. FIG. 1depicts about 36 ARP broadcast sources 212.

In an embodiment, the spin-on mass 216 is processed within a closed tooland die tool is flooded with solvent vapors that are indigenous to thespin-on mass 216. Consequently, solvent within the spin-on mass 216 hasa lowered driving force because of a lower solvent concentrationgradient between the spin-on-mass and the environment. Consequently thesolvent may be hindered in the process of escaping the spin-on mass 216into the environment within the tool because of the overpressure placedon the solvent in the spin-on mass 216.

FIG. 2 b shows a cross-section elevation 201 of the semiconductive wafer214 during spin-on processing after further processing according to anembodiment. The spin-on mass 216 has been flattened such that the stepheight has been virtually eliminated. In this disclosure the term“virtually eliminated” with respect to step height in the spin-on massmeans no discernable difference in unevenness can be determined betweena region of no topography on a wafer surface and a region of device andmetallization layer 215 topography where device and metallizationexhibits topography steps.

FIG. 3 is a detail of a portion of an acoustic radiation pressure sourceduring spin-on processing according to an embodiment. The detail istaken from FIG. 2 at the section 3. In an embodiment, the mountingsubstrate 210 is moved in an oscillatory motion relative to the spin-onmaterial (not shown). FIG. 3 illustrates a lateral oscillatory motion inthe X-Y plane. Each ARP broadcast source 212 is illustrated with asymmetry line 228. A dashed circular motion line 230 illustratesoscillatory motion. In an embodiment, the oscillatory motion iseccentric oscillatory. In an embodiment, the symmetry line 228 of agiven ARP broadcast source 212 moves with an oscillatory motion suchthat an oscillatory radius 232 is achieved. In an embodiment, theoscillatory radius 234 is less than one half the characteristicdiameter, D, of the given ARP broadcast source 212. In an embodiment,the oscillatory radius 232 is substantially equal to the characteristicdiameter of the given ARP broadcast source 212. In an embodiment, theoscillatory radius 232 is greater than one half the characteristicdiameter of the given ARP broadcast source 212.

In an embodiment, the oscillatory radius 232 is greater than one halfthe characteristic diameter of the given ARP broadcast source 212 and islarge enough that the oscillatory motion of the ARP broadcast source 212causes the symmetry line 228 of an ARP broadcast source 212 to intersectthe dashed circular motion line 226 of a neighboring ARP broadcastsource 212. The degree of intersection therebetween may be quantified bythe intersection dimension 234. In an embodiment, the intersectiondimension 234 is less than half the oscillatory radius 228.

FIG. 4 shows a top plan view of a plurality of ARP broadcast sourcesdisposed in an array 400 according to an embodiment. The array 400includes a mounting substrate 410 and a plurality of ARP broadcastsources, one of which is designated with numeral 412. The array 400 mayhave a substantially circular form factor with a diameter that is largeenough to approximate the size of a semiconductive wafer during waferprocessing. As depicted, the array 400 has about 52 ARP broadcastsources 412 that are spaced apart upon the mounting substrate 410.

Reference is made to either FIG. 1 or FIG. 4. In a process embodiment,the array includes a plurality of ARP broadcast sources. During theformation of spin-on liquid, the plurality of ARP broadcast sources isactivated in the ultrasonic range to alter the liquid topography of thespin-on liquid.

In an embodiment, the array 100 is activated such that the broadcastsource enumerated with numeral 1 is first activated and remainsactivated, followed by the broadcast sources enumerated with numerals 2,which surround the broadcast source enumerated with numeral 1. Next, thebroadcast sources enumerated with numerals 3 are activated and remainactivated. Finally the broadcast sources enumerated with numeral 4 areactivated such that all broadcast sources are activated. Consequently, acenter-to-edge radial smoothing force is imposed upon the spin-on liquidunder conditions to alter the topography of the spin-on liquid.

In an embodiment, the aforementioned center-to-edge radial smoothingforce is imposed upon the spin-on liquid at a first ultrasonicfrequency, followed by a second center-to-edge radial smoothing force ata second ultrasonic frequency that is different than the firstultrasonic frequency. In an embodiment, the first ultrasonic frequencyis lower than the second ultrasonic frequency.

In an embodiment, the entire array 100 is activated substantiallysimultaneously. In an embodiment, the entire array 100 is activatedsubstantially simultaneously, at a first ultrasonic frequency, followedby altering the first ultrasonic frequency to a second frequency that isdifferent from the first frequency. In an embodiment, the firstultrasonic frequency is lower than the second ultrasonic frequency.

In an embodiment, the array is activated at a sub-sonic frequency. Thecenter-to-edge radial smoothing force is then applied. In an embodiment,the array is activated at an ultrasonic frequency, and thecenter-to-edge radial smoothing force is then applied.

In an embodiment, the array 400 is activated such that the broadcastsources enumerated with numerals 1 are first activated, followed by thebroadcast sources enumerated with numerals 2, which surround thebroadcast sources enumerated with numeral 1. Next, the broadcast sourcesenumerated with numerals 3 are activated. Finally the broadcast sourcesenumerated with numeral 4 are activated. Consequently, a center-to-edgeradial smoothing force is imposed upon the spin-on liquid underconditions to alter the topography of the spin-on liquid.

In an embodiment, the entire array 400 is activated substantiallysimultaneously. In an embodiment, the entire array 400 is activatedsubstantially simultaneously, at a first ultrasonic frequency, followedby altering the first ultrasonic frequency to a second frequency that isdifferent from the first frequency. In an embodiment, the firstultrasonic frequency is lower than the second ultrasonic frequency.

In an embodiment, the entire array 400 is activated at a sub-sonicfrequency. The center-to-edge radial smoothing force is then applied. Inan embodiment, the entire array 400 is activated at an ultrasonicfrequency, and the center-to-edge radial smoothing force is thenapplied.

In can now be appreciated that other smoothing schemes may be used, suchas a traverse smoothing process that begins at one region of an ARPbroadcast source array. For example, some of the ARP broadcast sourceson the right-hand side of the array 400 may be activated, and thenactivation may traverse the face of the array 400 in a right-to-leftfashion, instead of a center to edge fashion, as described previously.The traverse smoothing process may be repeated with differentfrequencies. It can also be appreciated that ail disclosed embodimentsmay be carried out at megasonic frequencies.

FIG. 5 is a cross-section elevation of a spin-on mass applicator 500that uses acoustic radiation pressure during dispensing according to anembodiment. The spin-on mass applicator 500 includes a transducer 512that comprises an ARP broadcast source. A spin-on mass 516 forms as adroplet at the end of a syringe 513 that is affixed to the transducer512. The spin-on mass 516 depicts acoustic radiation pressure as waves520 emanating from the transducer 512 source. As the spin-on mass 516leaves the syringe 513, it has been set into internal motion by virtueof acoustic waves generated by the transducer 512.

In an embodiment, the spin-on mass applicator 500 may be positionedabove a semiconductive wafer that is being spun. The spin-on massapplicator 500 induces internal mixing motion within the spin-on mass516 that alters the final topography of the spin-on mass as it spinsonto the semiconductive wafer.

In an embodiment, the spin-on mass applicator 500 may be positioned atapproximately the center of a mounting substrate such as the mountingsubstrate 110, the mounting substrate 210, or the mounting substrate410. Accordingly, a space is made for the spin-on mass applicator 500.In an embodiment, a substantially centrally located ARP broadcast sourceis removed to allow a penetrating location for the spin-on massapplicator 500. In an embodiment, a plurality of spin-on massapplicators 500 may be positioned above the semiconductive wafer that isbeing processed.

In an embodiment, the spin-on mass applicator 500 and an array of ARPbroadcast sources are used substantially simultaneously. Consequently,the spin-on mass 516 is first perturbed by the transducer 512, andsecond perturbed by at least one ARP broadcast sources, such as at leastone of ARP broadcast sources 112, 212, 412 mounted upon one of themounting substrate 110, the mounting substrate 210, or the mountingsubstrate 410.

In an embodiment, spin-on mass viscosity may be combined with spin rateand/or sonic frequency from the ARP broadcast source as variables.Further, saturation of a tool with a solvent that is soluble in thespin-on mass may be combined with spin rate and/or sonic frequency fromthe ARP broadcast source as variables.

FIG. 6 is a process flow diagram according to an embodiment.

At block 610, the process 600 includes forming a spin-on film liquidtopography upon a semiconductive substrate.

At 620, the process 600 includes imposing ultrasonic radiation pressureonto the spin-on film liquid topography under conditions to alter theliquid topography.

At 630, the process 600 includes imposing the ultrasonic radiationpressure from at least one of above and below the spin-on film liquid.The directions “above” and “below” are given with respect to FIG. 3where the broadcast source 212 is above the spin-on film liquid that isin a gravity field, and the broadcast source 213 is below the spin-onfilm liquid that is also in the gravity field.

At 640, the process 600 includes altering the frequency from a firstfrequency to a second frequency, wherein the second frequency isdifferent from the first frequency.

It should be noted that the methods and processes described herein donot have to be executed in the order described, or in any particularorder. Thus, various activities described with respect to the methodsidentified herein can be executed in repetitive, simultaneous, serial,or parallel fashion.

This Detailed Description refers to the accompanying drawings that show,by way of illustration, specific embodiments in which the presentdisclosure may be practiced. These embodiments are described insufficient detail to enable those skilled in the art to practice thedisclosed embodiments. Other embodiments may be used and structural,logical, and electrical changes may be made without departing from thescope of the present disclosure. The various embodiments are notnecessarily mutually exclusive, as some embodiments can be combined withone or more other embodiments to form new embodiments.

The Detailed Description is, therefore, not to be taken in a limitingsense, and the scope of this disclosure is defined only by the appendedclaims, along with the full scope of equivalents to which such claimsare entitled.

The terms “wafer” and “substrate” used in the description include anystructure having an exposed surface with which to form an electronicdevice or device component such as a component of an integrated circuit(IC). The term substrate is understood to include semiconductor wafers.The term substrate is also used to refer to semiconductor structuresduring processing and may include other layers such assilicon-on-insulator (SOI), etc. that have been fabricated thereupon.Both wafer and substrate include doped and undoped semiconductors,epitaxial semiconductor layers supported by a base semiconductor orinsulator, as well as other semiconductor structures well known to oneskilled in the art.

The term “conductor” is understood to include semiconductors, and theterm “insulator” or “dielectric” is defined to include any material thatis less electrically conductive than the materials referred to asconductors.

The term “horizontal” as used in this application is defined as a planeparallel to the conventional plane or surface of a wafer or substrate,regardless of the orientation of the wafer or substrate. The term“vertical” refers to a direction perpendicular to the horizontal asdefined above. Prepositions, such as “on,” “side” (as in “sidewall”),“higher,” “lower,” “over,” and “under” are defined with respect to theconventional plane or surface being on the top surface of the wafer orsubstrate, regardless of the orientation of the wafer or substrate.

The Abstract is provided to comply with 37 C.F.R.§1.72(b), requiring anabstract that will allow the reader to quickly ascertain the nature ofthe technical disclosure. It is submitted with the understanding that itwill not be used to interpret or limit the scope or meaning of theclaims. In addition, in the foregoing Detailed Description, variousfeatures may be grouped together to streamline the disclosure. Thismethod of disclosure is not to be interpreted as reflecting an intentionthat the claimed embodiments require more features than are expresslyrecited in each claim. Rather, as the following claims reflect,inventive subject matter may lie in less than all features of a singledisclosed embodiment. Thus the following claims are hereby incorporatedinto the Detailed Description, with each claim standing on its own as aseparate embodiment.

1. An apparatus comprising: a spinner on which to place a wafer; asource operable to alter topography of a spin-on mass when the spin-onmass is on the wafer, the source being an acoustic radiation pressurebroadcast source; a mounting substrate to which the source is mounted,the mounting substrate moveable in an oscillatory motion.
 2. The processof claim 1, wherein the oscillatory motion is coordinated with adiameter of the source.
 3. The process of claim 1, wherein theoscillatory motion includes lateral oscillatory motion.
 4. The processof claim 1, wherein the oscillatory motion includes vertical oscillatorymotion.
 5. The process of claim 1, wherein the apparatus includes anapplicator to dispense the spin-on mass onto the wafer, the applicatorhaving a transducer in which an acoustic radiation pressure broadcastsource is disposed.
 6. An apparatus comprising: a spinner on which toplace a wafer; an array of sources operable to alter topography of aspin-on mass when the spin-on mass is on the wafer, the sources beingacoustic radiation pressure broadcast sources; a mounting substrate towhich the sources are mounted, the mounting substrate moveable in anoscillatory motion.
 7. The apparatus of claim 6, wherein the oscillatorymotion includes eccentric oscillatory motion.
 8. The apparatus of claim6, wherein the sources are individually selectable for activation. 9.The apparatus of claim 6, wherein one or more of the sources arecontrollable to emanate acoustic radiation at frequencies less thanabout 900 kHz.
 10. The apparatus of claim 6, wherein one or more of thesources are controllable to emanate acoustic radiation at frequencies inthe range from about 900 kHz to about 2 MHz.
 11. The apparatus of claim6, wherein one or more of the sources are controllable to emanatemodulated acoustic radiation.
 12. The apparatus of claim 11, wherein themodulated acoustic radiation includes amplitude modulation, frequencymodulation, or both amplitude modulation and frequency modulation. 13.The apparatus of claim 6, wherein the oscillatory motion has anoscillatory radius set in accordance with a characteristic length of asource of the array of sources.
 14. The apparatus of claim 13, whereinthe oscillator radius is set less than or equal to a characteristicdiameter of the source.
 15. The apparatus of claim 6, wherein the arrayhas a substantially circular form factor with a diameter to approximatea size of a selected wafer to be processed.
 16. The apparatus of claim6, wherein the apparatus includes a plurality of applicators structuredto dispense material of the spin-on mass onto the wafer, each applicatorhaving a transducer in which an acoustic radiation pressure broadcastsource is disposed.
 17. An apparatus comprising: a spinner on which toplace a wafer to be processed; a first array of sources operable toalter topography of a spin-on mass when the spin-on mass is on thewafer, the sources being acoustic radiation pressure broadcast sources,the first array operably disposed above the wafer to be processed; afirst mounting substrate to which the first array is mounted, the firstmounting substrate moveable in an oscillatory motion; a second array ofsources operable to alter topography of a spin-on mass when the spin-onmass is on the wafer, the sources being acoustic radiation pressurebroadcast sources, the second array operably disposed below the wafer tobe processed; a second mounting substrate to which the second array ismounted.
 18. The apparatus of claim 17, wherein the apparatus isstructured such that the first array is operably spaced apart, and abovethe spin-on mass by a spacing distance, the spacing distance related toa diameter of one of the sources of the first array.
 19. The apparatusof claim 17, wherein the first array and the second array areindividually selectable for activation to process the wafer.
 20. Theapparatus of claim 17, wherein an applicator is disposed among thesources of the first array, the applicator structured to dispense thespin-on mass onto the wafer, the applicator having a transducer in whicha acoustic radiation pressure broadcast source is disposed.